Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy
نویسندگان
چکیده
منابع مشابه
Depth-profiling X-ray photoelectron spectroscopy (XPS) analysis of interlayer diffusion in polyelectrolyte multilayers.
Functional organic thin films often demand precise control over the nanometer-level structure. Interlayer diffusion of materials may destroy this precise structure; therefore, a better understanding of when interlayer diffusion occurs and how to control it is needed. X-ray photoelectron spectroscopy paired with C60(+) cluster ion sputtering enables high-resolution analysis of the atomic composi...
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ژورنال
عنوان ژورنال: Hyomen Kagaku
سال: 1996
ISSN: 0388-5321,1881-4743
DOI: 10.1380/jsssj.17.758